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Title:Formation of Silicon Nitride Structures by Direct Electron-Beam Writing
Author(s):Chin, Brymer Han-Yu
Issue Date:1982-02
Publisher:Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report:Coordinated Science Laboratory Report no. UILU-ENG 82-2206, R-940
Genre:Report
Type:Text
Language:English
Description:Coordinated Science Laboratory changed its name from Control Systems Laboratory
URI:http://hdl.handle.net/2142/75662
Sponsor:Joint Services Electronics Program / N00014-79-C-0424
Date Available in IDEALS:2015-04-22


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