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Title:Swept Line Electron Beam Annealing of Ion-Implanted Semiconductors
Alternative Title:Swept Line Electron Beam Annealing of Ion Implanted Semiconductors
Author(s):Soda, Kenneth James
Subject(s):Electron beam annealing
Ion-implantation
Ion implantation
Issue Date:1982-07
Publisher:Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report:Coordinated Science Laboratory Report no. UILU-ENG-82-2216, R-950
Genre:Report
Type:Text
Language:English
Description:Coordinated Science Laboratory changed its name from Control Systems Laboratory
URI:http://hdl.handle.net/2142/75663
Sponsor:Joint Services Electronics Program / N00014-79-C-0424
Army Research Office / DAAG-29-80-C-0011
Date Available in IDEALS:2015-04-22


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