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Title:Encapsulation and Implantation Studies of Indium Phosphide
Alternative Title:Encapsulation and Implantation Studies of InP
Author(s):Oberstar, John David
Subject(s):Semiconductors
Ion implantation
Indium phosphide
Issue Date:1982-07
Publisher:Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report:Coordinated Science Laboratory Report no. UILU-ENG 82-2224, R-958
Genre:Report
Type:Text
Language:English
Description:Coordinated Science Laboratory changed its name from Control Systems Laboratory
URI:http://hdl.handle.net/2142/75666
Sponsor:Joint Services Electronics Program
Date Available in IDEALS:2015-04-22


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