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Title:Experimental Studies of Laterally Seeded Recrystallized Polysilicon on Silicon Dioxide
Author(s):Banerjee, Sanjay Kumar
Subject(s):Semiconductors
Silicon-on-insulator
Ion implantation
Issue Date:1983-07
Publisher:Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report:Coordinated Science Laboratory Report no. UILU-ENG 83-2212, R-991
Genre:Report
Type:Text
Language:English
Description:Coordinated Science Laboratory changed its name from Control Systems Laboratory
URI:http://hdl.handle.net/2142/75673
Sponsor:Joint Services Electronics Program and Office of Naval Research / N00014-79-C-0424 and N00014-81-K-0431
Date Available in IDEALS:2015-04-22


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