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Title:Measurement and model of a radio frequency microelectromechanical switch
Author(s):Handler, Drew E
Department / Program:Electrical & Computer Eng
Discipline:Electrical & Computer Engr
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:M.S.
Genre:Thesis
Subject(s):microelectromechanical systems (MEMS)
radio frequency (RF)
S-parameter
Abstract:A novel process for the fabrication of microelectromechanical systems (MEMS) has been introduced. One potential application of this process is a radio frequency (RF) MEMS switch. This thesis provides an overview of the measurement and modeling techniques used to verify the functionality of an RF MEMS switch that was fabricated using this process. This thesis confirms that this specific RF MEMS design was not fully functioning, but can still be measured, characterized, and modeled.
Issue Date:2015-04-13
Type:Thesis
URI:http://hdl.handle.net/2142/78364
Rights Information:Copyright 2015 Drew Handler
Date Available in IDEALS:2015-07-22
Date Deposited:May 2015


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