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Title:A tip-tilt-piston micromirror with elastomeric universal joint fabricated via micro-masonry
Author(s):Yang, Zining
Contributor(s):Kim, Seok
Department / Program:Mechanical Sci & Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:M.S.
Genre:Thesis
Subject(s):transfer printing
micro-masonry
microassembly
microscanner
micromirror
Abstract:This thesis presents the design, analytical and numerical modeling, fabrication and characterization of a hybrid tip-tilt-piston micromirror driven by electrostatic actuation. The micromirror involves a single crystal silicon mirror and a conductive elastomeric universal joint which are mechanically bonded and electrically interconnected. This device takes advantage of two distinct materials to achieve a high quality reflective surface using single crystal silicon and a highly flexible joint using an elastomer. To realize this hybrid system, micro-masonry techniques are employed such that silicon and elastomer parts are fabricated separately and integrated afterwards. The static and dynamic behaviors of the micromirror are characterized, indicating identical response about its two orthogonal scanning axes. Furthermore, the piston stroke utilized by the compressive deformation of the elastomeric joint along z-axis is investigated.
Issue Date:2014-12-12
Type:Thesis
URI:http://hdl.handle.net/123456789/4019
http://hdl.handle.net/2142/79022
Rights Information:Copyright 2014 Zining Yang
Date Available in IDEALS:2015-08-07
Date Deposited:December 2


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