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Title:Studies of Field -Induced Stress on Ultrathin Layers of Silicon Dioxide on a Silicon Substrate
Author(s):Archer, Allan Phillip
Doctoral Committee Chair(s):Nayfeh, Munir H.
Department / Program:Physics
Discipline:Physics
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Physics, Condensed Matter
Abstract:We present here the results of an STM study of ultrathin silicon dioxide layers on a silicon substrate. We have found that under certain conditions, structures subjected to field-induced stress with the STM exhibit changes in their conductivity which we believe are evident in the images as the voltage of the STM is varied. We focus here on that subset of field stress parameters yielding structures which specifically exhibit this conductivity change.
Issue Date:2001
Type:Text
Language:English
Description:66 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2001.
URI:http://hdl.handle.net/2142/80459
Other Identifier(s):(MiAaPQ)AAI3017014
Date Available in IDEALS:2015-09-25
Date Deposited:2001


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