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Title:Micromachined, Out-of-Plane Micro Flow Sensors
Author(s):Chen, Jack
Doctoral Committee Chair(s):Chang Liu
Department / Program:Electrical Engineering
Discipline:Electrical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Electronics and Electrical
Abstract:In addition, we use the fabrication platform to integrate 8 sensor array with on-chip signal conditioning using a commercial operational amplifier circuit. A new method to make the sensor array flexible is also proposed.
Issue Date:2005
Type:Text
Language:English
Description:121 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2005.
URI:http://hdl.handle.net/2142/80901
Other Identifier(s):(MiAaPQ)AAI3182236
Date Available in IDEALS:2015-09-25
Date Deposited:2005


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