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Title:Microelectromechanical and Microfluidic Systems for Scanning Probe Lithography
Author(s):Wang, Xuefeng
Doctoral Committee Chair(s):Chang Liu
Department / Program:Electrical Engineering
Discipline:Electrical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Electronics and Electrical
Abstract:This work addresses two major challenges faced by traditional single-probe SPL technology---lithography throughput and probe coating technique. System-level improvements of SPL have been successfully achieved. First, micromachined, thermally actuated cantilever probe arrays are developed to improve the throughput and flexibility of SPL. Multiple distinct patterns have been generated simultaneously with sub-50-nm line width in dip pen nanolithography (DPN) mode. Then, development of scanning probe contact printing (SPCP) technology and multifunctional probe arrays has expanded the capability of conventional single-functional SPL and demonstrated an excellent example of a highly integrated scanning probe device for pattern generation in DPN and SPCP modes and pattern inspection in AFM and LFM modes. In addition, the development of integrated microfluidic inking chips for chemical ink handling and SPL probe treatment further enhances the power of arrayed scanning probes. The inking chip can potentially coat an array of SPL tips with different inks simultaneously for multi-ink lithography.
Issue Date:2005
Type:Text
Language:English
Description:143 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2005.
URI:http://hdl.handle.net/2142/80938
Other Identifier(s):(MiAaPQ)AAI3199167
Date Available in IDEALS:2015-09-25
Date Deposited:2005


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