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Description
Title: | Cross-Sectional Scanning Tunneling Microscopy Investigations of Cleaved Iii-V Heterostructures |
Author(s): | Wu, Warren |
Doctoral Committee Chair(s): | Tucker, John R. |
Department / Program: | Electrical Engineering |
Discipline: | Electrical Engineering |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | Ph.D. |
Genre: | Dissertation |
Subject(s): | Engineering, Electronics and Electrical |
Abstract: | Fabrication technology and device sizes have reached the point where fluctuations on the atomic level may affect device performance. The need for a tool to characterize these structures has been satisfied by cross-sectional scanning tunneling microscopy (XSTM). This thesis details the development and application of XSTM to III-V heterostructures. An ultra-high vacuum (UHV) system dedicated to XSTM has been specifically designed and constructed as part of this work. Reported for the first time are XSTM cross-sections of self-assembled InAs quantum dots, XSTM cross-sections of quantum wires created by the strain-induced lateral-layer ordering (SILO) process as well as the first XSTM data on working device structures. These working device structures include a few resonant tunneling diode (RTD) structures, a quantum well infrared photodetector structure and a modulation doped field effect transistor (MODFET) structure. XSTM has proved useful in characterizing interface roughness, alloy fluctuations and individual atomic positions. |
Issue Date: | 1997 |
Type: | Text |
Language: | English |
Description: | 82 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1997. |
URI: | http://hdl.handle.net/2142/81170 |
Other Identifier(s): | (MiAaPQ)AAI9717349 |
Date Available in IDEALS: | 2015-09-25 |
Date Deposited: | 1997 |
This item appears in the following Collection(s)
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Dissertations and Theses - Electrical and Computer Engineering
Dissertations and Theses in Electrical and Computer Engineering -
Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois