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Title:Particles in Plasma Processing Reactors: Modeling Nucleation, Transport, and Interparticle Effects to Reduce Wafer Contamination
Author(s):Hwang, Helen H.
Doctoral Committee Chair(s):Kushner, M.J.
Department / Program:Electrical Engineering
Discipline:Electrical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Materials Science
Abstract:Particle transport is also affected by Coulomb interactions between particles. Experimental observations showed that in trapping sites particles form clouds and move collectively. We numerically investigated Coulomb interactions between particles. In rf discharges, ordered systems (Coulomb liquids or solids) occur at low particle temperatures. Dislocations in lattices result because of impurities of differently sized particles due to the disparity in particle charges. Waves may be induced by impacting a Coulomb solid with energetic particles. Repeated impacts can liquify the lattice if the particles do not dissipate enough energy as a result of fluid drag effects or Coulomb collisions.
Issue Date:1997
Type:Text
Language:English
Description:126 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1997.
URI:http://hdl.handle.net/2142/81185
Other Identifier(s):(MiAaPQ)AAI9737140
Date Available in IDEALS:2015-09-25
Date Deposited:1997


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