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Title:Transport and Agglomeration of Dust Contaminant Particles in Reactive Ion Etch Reactors
Author(s):Huang, Frederick Yi-Kai
Doctoral Committee Chair(s):Kushner, M.J.
Department / Program:Electrical Engineering
Discipline:Electrical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Physics, Fluid and Plasma
Abstract:The morphology of the agglomerates formed was also found to be dependent on plasma conditions. Agglomerates generally grow either in a diffusive or ballistic manner. Neutral gas flow in the reactor has been found to be a useful means of controlling contamination. Higher flow rates can sweep dust particles away from sensitive areas of the reactor before they reach the surfaces.
Issue Date:1997
Type:Text
Language:English
Description:97 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1997.
URI:http://hdl.handle.net/2142/81209
Other Identifier(s):(MiAaPQ)AAI9812632
Date Available in IDEALS:2015-09-25
Date Deposited:1997


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