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Title:Microdischarge Devices Fabricated in Silicon
Author(s):Frame, James Warren
Doctoral Committee Chair(s):DeTemple, Thomas A.
Department / Program:Electrical Engineering
Discipline:Electrical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Electronics and Electrical
Abstract:The second portion of this research examined the fabrication and characterization of a device fabrication using ultrasonic milling, the microdischarge. The current-voltage characteristics and spectra of the devices were recorded. Operation of microdischarge devices in the excimer species XeI, XeO, and I 2 was investigated. Arrays of microdischarge devices were fabricated and tested using a new geometry and biasing scheme.
Issue Date:1998
Type:Text
Language:English
Description:110 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1998.
URI:http://hdl.handle.net/2142/81262
Other Identifier(s):(MiAaPQ)AAI9912230
Date Available in IDEALS:2015-09-25
Date Deposited:1998


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