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Description
Title: | Process Development and Characterization of AlGaN/GaN Heterostructure Field-Effect Transistors |
Author(s): | Ping, Andrew Taiann |
Doctoral Committee Chair(s): | Adesida, Ilesanmi |
Department / Program: | Electrical Engineering |
Discipline: | Electrical Engineering |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | Ph.D. |
Genre: | Dissertation |
Subject(s): | Engineering, Electronics and Electrical |
Abstract: | The fabrication of AlGaN/GaN HFETs entailed first developing fundamental processing techniques such as isolation etching, low-resistance drain/source ohmic contacts, and Schottky gate formation. These efforts along with related processing issues will be discussed. Devices were then fabricated on epitaxial layers grown on sapphire substrates and on n-type, p-type, and insulating SiC. While sapphire is the substrate of choice for the nitrides, SiC substrates are better suited for high-power devices due to their significantly higher thermal conductivity. The dc, RF, and high-temperature performance of transistors on sapphire and SiC were investigated to determine the performance similarities and differences between using the various substrates. Forming low-resistance ohmic contacts to the wide bandgap heterostructures is difficult and as a result limits the overall device performance. In an effort to improve drain-source contacts, gate recessing through the use of low-damage inductively coupled plasma reactive ion etching was pursued. A wet chemical etching process called photoelectrochemical etching was also investigated. |
Issue Date: | 1999 |
Type: | Text |
Language: | English |
Description: | 101 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1999. |
URI: | http://hdl.handle.net/2142/81312 |
Other Identifier(s): | (MiAaPQ)AAI9953111 |
Date Available in IDEALS: | 2015-09-25 |
Date Deposited: | 1999 |
This item appears in the following Collection(s)
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Dissertations and Theses - Electrical and Computer Engineering
Dissertations and Theses in Electrical and Computer Engineering -
Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois