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Title:Multiscale Simulations of Nanofabricated Structures: Application to Copper Electrodeposition for Electronic Devices
Author(s):Drews, Timothy Owen
Doctoral Committee Chair(s):Alkire, Richard C.; Braatz, Richard D.
Department / Program:Chemical and Biomolecular Engineering
Discipline:Chemical and Biomolecular Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Materials Science
Abstract:*This dissertation is a compound document (contains both a paper copy and a CD as part of the dissertation). The CD requires the following system requirements: Microsoft Office.
Issue Date:2004
Type:Text
Language:English
Description:358 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004.
URI:http://hdl.handle.net/2142/82363
Other Identifier(s):(MiAaPQ)AAI3131068
Date Available in IDEALS:2015-09-25
Date Deposited:2004


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