Files in this item
| Files | Description | Format |
|---|---|---|
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application/pdf  3131068.pdf (16MB) | (no description provided) | |
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application/zip  3131068.zip (282kB) | Supplemental | ZIP |
Description
| Title: | Multiscale Simulations of Nanofabricated Structures: Application to Copper Electrodeposition for Electronic Devices |
| Author(s): | Drews, Timothy Owen |
| Doctoral Committee Chair(s): | Alkire, Richard C.; Braatz, Richard D. |
| Department / Program: | Chemical and Biomolecular Engineering |
| Discipline: | Chemical and Biomolecular Engineering |
| Degree Granting Institution: | University of Illinois at Urbana-Champaign |
| Degree: | Ph.D. |
| Genre: | Dissertation |
| Subject(s): | Engineering, Materials Science |
| Abstract: | *This dissertation is a compound document (contains both a paper copy and a CD as part of the dissertation). The CD requires the following system requirements: Microsoft Office. |
| Issue Date: | 2004 |
| Type: | Text |
| Language: | English |
| Description: | 358 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004. |
| URI: | http://hdl.handle.net/2142/82363 |
| Other Identifier(s): | (MiAaPQ)AAI3131068 |
| Date Available in IDEALS: | 2015-09-25 |
| Date Deposited: | 2004 |
This item appears in the following Collection(s)
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Dissertations and Theses - Chemical and Biomolecular Engineering
Dissertations and Theses - Chemical and Biomolecular Engineering -
Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois