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Title:Control of Thin-Film Silicon Microstructure With Low-Energy Particle Bombardment in Reactive Sputtering
Author(s):Gerbi, Jennifer Elizabeth
Doctoral Committee Chair(s):Abelson, John Robert
Department / Program:Materials Science and Engineering
Discipline:Materials Science and Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Physics, Condensed Matter
Abstract:Hydrogen can be added to the growth chamber to promote a phase change to nanocrystalline silicon at moderate growth temperatures. The growth flux with hydrogen includes energetic (∼100eV) neutral H, produced by the reflection of H2+ions from the target. We determine the kinetic role of these fast H neutrals in the nanocrystalline phase formation by substituting D for H during growth. Crystallization is enhanced with D; we suggest that this higher mass specie enhances a sub-surface restructuring process by enhanced momentum transfer to silicon atoms.
Issue Date:2001
Type:Text
Language:English
Description:83 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2001.
URI:http://hdl.handle.net/2142/82698
Other Identifier(s):(MiAaPQ)AAI3017080
Date Available in IDEALS:2015-09-25
Date Deposited:2001


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