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Description
Title: | Preparations and Characterizations of Tantalum Pentoxide-Titanium Dioxide: Ceramics and Thin Films |
Author(s): | Hemjinda, Sarunya |
Doctoral Committee Chair(s): | Payne, David A. |
Department / Program: | Materials Science and Engineering |
Discipline: | Materials Science and Engineering |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | Ph.D. |
Genre: | Dissertation |
Subject(s): | Engineering, Materials Science |
Abstract: | A chemical-solution deposition method was used to integrate thin films of Ta2O5-TiO2 onto silicon substrates. Precursor solutions were successfully prepared using Ta(OEt)5 and Ti(OEt) 4 in ethanol. Solution stability was shown to be influenced by several factors, including, Rw ratio, additions of HCl, and, most importantly, conditions of hydrolysis. Electrical measurements revealed that amorphous films exhibited the most favorable dielectric properties, with low tandelta = 0.005 and K' = 27. |
Issue Date: | 2001 |
Type: | Text |
Language: | English |
Description: | 191 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2001. |
URI: | http://hdl.handle.net/2142/82709 |
Other Identifier(s): | (MiAaPQ)AAI3030436 |
Date Available in IDEALS: | 2015-09-25 |
Date Deposited: | 2001 |
This item appears in the following Collection(s)
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Dissertations and Theses - Materials Science and Engineering
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Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois