Files in this item
Files | Description | Format |
---|---|---|
application/pdf ![]() ![]() | (no description provided) |
Description
Title: | Low-Temperature Silicon Thin Films for Large-Area Electronics: Device Fabrication Using Soft Lithography and Laser-Crystallization by Sequential Lateral Solidification |
Author(s): | Jin, Hyun-Chul |
Doctoral Committee Chair(s): | Abelson, John Robert |
Department / Program: | Materials Science and Engineering |
Discipline: | Materials Science and Engineering |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | Ph.D. |
Genre: | Dissertation |
Subject(s): | Engineering, Materials Science |
Abstract: | We have analyzed the electrical properties of SLS poly-Si films on oxidized Si wafer using the pseudo-MOSFET geometry; the majority carrier mobility is extracted from the transconductance. However, the data are non-ideal due to large contact resistance and current spreading. We discuss the future use of these electrical characterization techniques to analyze the properties of individual grain boundaries in thin film Si bicrystals formed by SLS. |
Issue Date: | 2001 |
Type: | Text |
Language: | English |
Description: | 109 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2001. |
URI: | http://hdl.handle.net/2142/82710 |
Other Identifier(s): | (MiAaPQ)AAI3030441 |
Date Available in IDEALS: | 2015-09-25 |
Date Deposited: | 2001 |
This item appears in the following Collection(s)
-
Dissertations and Theses - Materials Science and Engineering
-
Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois