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Title:In Situ High-Temperature Scanning Tunneling Microscopy Studies of Early Stage Growth Kinetics During Titanium Nitride Epitaxy
Author(s):Kodambaka, Suneel Kumar
Doctoral Committee Chair(s):Greene, Joseph E.
Department / Program:Materials Science and Engineering
Discipline:Materials Science and Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Materials Science
Abstract:During the course of my research, I have developed methods to grow atomically-smooth TiN(001) and (111) single-crystal layers with simple well-defined single-atom-high 2D island configurations on large atomically-smooth terraces. I used in situ scanning tunneling microscopy to study time- and temperature-dependent 2D island coarsening/decay kinetics, obtain 2D equilibrium island shapes, and follow temporal fluctuations of island shapes on both TiN(001) and (111) surfaces. I have developed a combination of experimental and theoretical techniques to analyze the surface dynamics measurements and determined adatom surface transport parameters, step energies, step stiffnesses, and kink formation energies on TiN(001) and TiN(111) surfaces.
Issue Date:2002
Type:Text
Language:English
Description:132 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2002.
URI:http://hdl.handle.net/2142/82731
Other Identifier(s):(MiAaPQ)AAI3070354
Date Available in IDEALS:2015-09-25
Date Deposited:2002


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