Epitaxy of Self -Assembled Nanostructures by Metalorganic Chemical Vapor Deposition

Yeoh, Terence Sern-Wei

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Title:	Epitaxy of Self -Assembled Nanostructures by Metalorganic Chemical Vapor Deposition
Author(s):	Yeoh, Terence Sern-Wei
Doctoral Committee Chair(s):	Coleman, James J.
Department / Program:	Materials Science and Engineering
Discipline:	Materials Science and Engineering
Degree Granting Institution:	University of Illinois at Urbana-Champaign
Degree:	Ph.D.
Genre:	Dissertation
Subject(s):	Engineering, Materials Science
Abstract:	The future of self-assembled nanostructures lies in the selective placement of individual nanostructures for applications such as integrated optoelectronics, quantum computing and quantum encryption. By utilizing InGaAs thin films, a method of selective area epitaxy has been developed. Not only is the technique better suited for self-assembled nanostructure growth and processing, but single island growth with resolutions on the order of 100 nanometers have been achieved.
Issue Date:	2003
Type:	Text
Language:	English
Description:	122 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2003.
URI:	http://hdl.handle.net/2142/82746
Other Identifier(s):	(MiAaPQ)AAI3102002
Date Available in IDEALS:	2015-09-25
Date Deposited:	2003