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Description
Title: | Epitaxy of Self -Assembled Nanostructures by Metalorganic Chemical Vapor Deposition |
Author(s): | Yeoh, Terence Sern-Wei |
Doctoral Committee Chair(s): | Coleman, James J. |
Department / Program: | Materials Science and Engineering |
Discipline: | Materials Science and Engineering |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | Ph.D. |
Genre: | Dissertation |
Subject(s): | Engineering, Materials Science |
Abstract: | The future of self-assembled nanostructures lies in the selective placement of individual nanostructures for applications such as integrated optoelectronics, quantum computing and quantum encryption. By utilizing InGaAs thin films, a method of selective area epitaxy has been developed. Not only is the technique better suited for self-assembled nanostructure growth and processing, but single island growth with resolutions on the order of 100 nanometers have been achieved. |
Issue Date: | 2003 |
Type: | Text |
Language: | English |
Description: | 122 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2003. |
URI: | http://hdl.handle.net/2142/82746 |
Other Identifier(s): | (MiAaPQ)AAI3102002 |
Date Available in IDEALS: | 2015-09-25 |
Date Deposited: | 2003 |
This item appears in the following Collection(s)
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Dissertations and Theses - Materials Science and Engineering
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Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois