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Description
Title: | Nanostructural, Surface Morphological Evolution, and Physical Properties of Sodium Chloride-Structure Titanium Nitride and Titanium Cerium Nitride Layers as a Function of Composition |
Author(s): | Lee, Tae-Yoon |
Doctoral Committee Chair(s): | Greene, Joseph E. |
Department / Program: | Materials Science and Engineering |
Discipline: | Materials Science and Engineering |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | Ph.D. |
Genre: | Dissertation |
Subject(s): | Physics, Condensed Matter |
Abstract: | I use a combination of alloying and low-energy ion irradiation during film growth to controllably manipulate the nanostructure of TiN-based layers. Ti0.8Ce0.2N films are grown on oxidized Si(001) at 350°C using UHV reactive magnetron sputter deposition in pure N2. The N+2 to metal ratio incident at the growing film is maintained constant at 15 while the ion energy EN+2 is varied from 14 to 45 eV. Films grown with EN+2 = 14 eV consist of equiaxed nanograins with an average size of 2.0 nm while layers deposited with EN+2 = 45 eV exhibit a 2-nm-wide nanocolumnar structure. In both cases, the films are dense, atomically smooth, and have strong 002 preferred orientation with low stress. |
Issue Date: | 2004 |
Type: | Text |
Language: | English |
Description: | 121 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004. |
URI: | http://hdl.handle.net/2142/82756 |
Other Identifier(s): | (MiAaPQ)AAI3160913 |
Date Available in IDEALS: | 2015-09-25 |
Date Deposited: | 2004 |
This item appears in the following Collection(s)
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Dissertations and Theses - Materials Science and Engineering
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Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois