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Title:Nanostructural, Surface Morphological Evolution, and Physical Properties of Sodium Chloride-Structure Titanium Nitride and Titanium Cerium Nitride Layers as a Function of Composition
Author(s):Lee, Tae-Yoon
Doctoral Committee Chair(s):Greene, Joseph E.
Department / Program:Materials Science and Engineering
Discipline:Materials Science and Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Subject(s):Physics, Condensed Matter
Abstract:I use a combination of alloying and low-energy ion irradiation during film growth to controllably manipulate the nanostructure of TiN-based layers. Ti0.8Ce0.2N films are grown on oxidized Si(001) at 350°C using UHV reactive magnetron sputter deposition in pure N2. The N+2 to metal ratio incident at the growing film is maintained constant at 15 while the ion energy EN+2 is varied from 14 to 45 eV. Films grown with EN+2 = 14 eV consist of equiaxed nanograins with an average size of 2.0 nm while layers deposited with EN+2 = 45 eV exhibit a 2-nm-wide nanocolumnar structure. In both cases, the films are dense, atomically smooth, and have strong 002 preferred orientation with low stress.
Issue Date:2004
Description:121 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004.
Other Identifier(s):(MiAaPQ)AAI3160913
Date Available in IDEALS:2015-09-25
Date Deposited:2004

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