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Description
Title: | Advanced Soft Lithography and Microstructured Semiconductors (mus-Sc) for Macroelectronics |
Author(s): | Lee, Keon Jae |
Doctoral Committee Chair(s): | Nuzzo, Ralph G. |
Department / Program: | Materials Science and Engineering |
Discipline: | Materials Science and Engineering |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | Ph.D. |
Genre: | Dissertation |
Subject(s): | Engineering, Electronics and Electrical |
Abstract: | Another main focus of my research is macroelectronics, referred to flexible and large area electronics. We employed newly developed technology from our group, called microstructured semiconductor (mus-Sc) that carved from bulk single crystal wafer using the standard microfabrication process. Soft lithographic approach was used to print this form of mus-Sc onto plastic substrate and it overcame many current limitations of the flexible electronics. High performance mus-Sc devices using both single crystal Si and GaN materials were successfully fabricated on plastic substrate. |
Issue Date: | 2006 |
Type: | Text |
Language: | English |
Description: | 169 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2006. |
URI: | http://hdl.handle.net/2142/82780 |
Other Identifier(s): | (MiAaPQ)AAI3223643 |
Date Available in IDEALS: | 2015-09-25 |
Date Deposited: | 2006 |
This item appears in the following Collection(s)
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Dissertations and Theses - Materials Science and Engineering
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Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois