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Title:Dewetting and Stress Evolution in Thin Films During Ion Irradiation
Author(s):Zhao, Kai
Doctoral Committee Chair(s):Averback, Robert
Department / Program:Materials Science and Engineering
Discipline:Materials Science and Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Subject(s):Engineering, Materials Science
Abstract:This project studies the morphology evolution of non-wetting metal films on a substrate during ion irradiation. It reveals that the mobility of the solid atoms is significantly improved during irradiation and the non-wetting films can dewet as if they are melted. The ion induced dewetting process can result into patterned nanoscale structures by self-organization. This project also investigates the stress evolution in thin films when they're bombarded with ∼1keV ions. Processes such as vacancy creation and phase transformation play important roles in the stress accumulation of the films. Meanwhile, it is discovered that atoms can be injected into deeper region from the ion bombarded layer during irradiation, inducing a compressive stress generation process. It is also noticed that despite the variance in their microstructures, the films show many common features in stress development during ion irradiation.
Issue Date:2008
Description:114 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2008.
Other Identifier(s):(MiAaPQ)AAI3337989
Date Available in IDEALS:2015-09-25
Date Deposited:2008

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