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Title:Additive Fabrication of Microstructures Using Self-Assembled Organic Thin-Film Templates
Author(s):Jeon, Noo Li
Doctoral Committee Chair(s):Ralpha G. Nuzzo
Department / Program:Materials Science and Engineering
Discipline:Materials Science and Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Materials Science
Abstract:A simple multilayered device, a ferroelectric capacitor with platinum/PZT/platinum layers, was fabricated using the patterning methods developed in this thesis. This achievement demonstrates the possibility of developing a photolithography-free method for fabricating micron-scale metal-oxide-silicon devices based on printed organic thin films of self-assembled monolayers. With further development, the patterning of metal and ceramic thin films directed by SAMs appears to have a great potential in fabricating the three-dimensional thin film structures needed for advanced device technologies.
Issue Date:1997
Type:Text
Language:English
Description:214 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1997.
URI:http://hdl.handle.net/2142/82876
Other Identifier(s):(MiAaPQ)AAI9737143
Date Available in IDEALS:2015-09-25
Date Deposited:1997


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