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Description
Title: | Surface Morphology Evolution of Epitaxial TiN(001) Layers Grown by Reactive Magnetron Sputtering |
Author(s): | Karr, Brian William |
Doctoral Committee Chair(s): | Cahill, David G. |
Department / Program: | Materials Science and Engineering |
Discipline: | Materials Science and Engineering |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | Ph.D. |
Genre: | Dissertation |
Subject(s): | Engineering, Materials Science |
Abstract: | The group IV-B transition metal nitride TiN is widely employed as a wear-resistant coating on mechanical components and as a diffusion barrier in microelectronic devices. I use the epitaxial growth of single crystal TiN as a model system for insight on the evolution of surface morphology and microstructure in more complex polycrystalline films. Atomically-flat MgO substrates, prepared by air annealing at 950$\sp\circ$C for 12 hours, are verified by atomic force microscopy (AFM). Epitaxial TiN layers are grown on MgO(001) by reactive magnetron sputter deposition in pure N$\sb2$ at $\rm650 |
Issue Date: | 1997 |
Type: | Text |
Language: | English |
Description: | 152 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1997. |
URI: | http://hdl.handle.net/2142/82887 |
Other Identifier(s): | (MiAaPQ)AAI9812649 |
Date Available in IDEALS: | 2015-09-25 |
Date Deposited: | 1997 |
This item appears in the following Collection(s)
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Dissertations and Theses - Materials Science and Engineering
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Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois