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Title:Theoretical, Experimental, and Numerical Investigations Into Laser Repair of Adhered MEMS Structures
Author(s):Rogers, James W.
Doctoral Committee Chair(s):Leslie M. Phinney
Department / Program:Mechanical Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Mechanical
Abstract:A MEMS temperature sensor based on the buckling of fixed-fixed beams due to thermal expansion is designed, fabricated, and tested. Difficulties from fabrication including residual stress, and limited temporal and spatial resolution of the imaging system hindered the device performance, but fixed-fixed MEMS beams are used estimate the temperature difference between the beam and substrate and cooling time after laser irradiation.
Issue Date:2002
Type:Text
Language:English
Description:161 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2002.
URI:http://hdl.handle.net/2142/83779
Other Identifier(s):(MiAaPQ)AAI3070043
Date Available in IDEALS:2015-09-25
Date Deposited:2002


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