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Title:Study of Buoyancy -Induced Flows in a Prototypical CVD Reactor
Author(s):Luo, Gang
Doctoral Committee Chair(s):S. Pratap Vanka
Department / Program:Mechanical Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Mechanical
Abstract:Next, an understanding the influence of the transient operating conditions in the prototypical CVD reactor was sought. Film growth rate shows time varying pattern due to the transient operating conditions. But it oscillates between two end steady states. Thus, it is observed that film growth rate and uniformity cannot be improved by applying pulse sequence of precursor gas, pulse sequence of inlet mass flow rate, and time-varying rotation speed of the wafer.
Issue Date:2003
Type:Text
Language:English
Description:137 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2003.
URI:http://hdl.handle.net/2142/83802
Other Identifier(s):(MiAaPQ)AAI3111576
Date Available in IDEALS:2015-09-25
Date Deposited:2003


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