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Title:Scanning Probe Array Development for Dip Pen Nanolithography
Author(s):Bullen, David Andrew
Doctoral Committee Chair(s):Chang Liu
Department / Program:Mechanical Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Electronics and Electrical
Abstract:Out of five array concepts attempted, three are practical and were demonstrated using lithography. Several packaging schemes were developed and used to install the arrays in AFMs modified for multi-probe applications. The arrays were used to write patterns of 1-octadecanethiol on gold surfaces with line widths as small as 25nm, write speeds as fast as 20mum/sec, and up to four patterns overlapping the same region.
Issue Date:2004
Type:Text
Language:English
Description:126 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004.
URI:http://hdl.handle.net/2142/83822
Other Identifier(s):(MiAaPQ)AAI3160868
Date Available in IDEALS:2015-09-25
Date Deposited:2004


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