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Title:A Novel Method for Testing Freestanding Nanofilms Using a Custom MEMS Load Cell
Author(s):Leseman, Zayd Chad
Doctoral Committee Chair(s):Mackin, Thomas J.
Department / Program:Mechanical Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Mechanical
Abstract:Following fabrication, membrane thickness was measured using several methods, including: profilimetry, Scanning Electron Microscopy, and custom spectrophotometry. The mechanical properties of several membranes were measured using the apparatus, including membranes of gold, single crystal silicon, and nano-porous silicon. The elastic properties of both the gold and silicon agree with previous measurements. Interesting new behavior for each material was also observed, including a surface energy driven creep relaxation in gold membranes.
Issue Date:2006
Type:Text
Language:English
Description:101 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2006.
URI:http://hdl.handle.net/2142/83849
Other Identifier(s):(MiAaPQ)AAI3223650
Date Available in IDEALS:2015-09-25
Date Deposited:2006


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