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Title:Structure, Stress and Surface Evolution in Silicon Due to Ion Bombardment
Author(s):Kalyanasundaram, Nagarajan
Doctoral Committee Chair(s):Johnson, Harley T.; Freund, Jonathan B.
Department / Program:Mechanical Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Subject(s):Engineering, Materials Science
Abstract:In the second part of the work, a new multiscale computational method to study surface evolution is developed. In the new method, called crater function method, an average response of the silicon surface to a single argon impact is computed using molecular dynamics simulations at 500eV beam energies. These average responses (called crater functions) show the presence of ion-stimulated mass rearrangement at the surface in addition to mass removal by sputtering. These crater functions are incorporated into a continuum transport model to study the long-time surface evolution of micrometer-sized targets. These explain experimentally observed surface evolution and long-time amplitude saturation better than existing theoretical models.
Issue Date:2007
Description:106 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2007.
Other Identifier(s):(MiAaPQ)AAI3290266
Date Available in IDEALS:2015-09-25
Date Deposited:2007

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