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Title:Stochastic Modeling of Micro-Electromechanical Systems (Mems)
Author(s):Agarwal, Nitin
Doctoral Committee Chair(s):Aluru, Narayana R.
Department / Program:Mechanical Engineering
Discipline:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Mechanical
Abstract:In the final part, a data-driven stochastic collocation approach is presented, which seeks to characterize uncertain input parameters based on available experimental information. This approach models the uncertain parameters as independent random variables, for which the distributions are estimated based on experimental observations, using a nonparametric diffusion mixing based estimator. The efficiency and applicability of the developed stochastic modeling framework is demonstrated by simulating several MEMS devices, such as MEMS switches, resonators, comb-drives etc.
Issue Date:2009
Type:Text
Language:English
Description:186 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2009.
URI:http://hdl.handle.net/2142/83935
Other Identifier(s):(MiAaPQ)AAI3391869
Date Available in IDEALS:2015-09-25
Date Deposited:2009


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