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Description
Title: | Transition Metal Hydroborate Complexes: Structures, Syntheses, and Use as Chemical Vapor Deposition Precursors |
Author(s): | Goedde, Dean Matthew |
Doctoral Committee Chair(s): | Girolami, Gregory S. |
Department / Program: | Chemistry |
Discipline: | Chemistry |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | Ph.D. |
Genre: | Dissertation |
Subject(s): | Chemistry, Inorganic |
Abstract: | Passage of Zr(BH4)4 over heated substrates with a coincident flux of H atoms gives adhesive, mirror-bright films at a growth rate of 60 A/min. These films are smooth on the nanometer scale and possess electrical resistivities as low as 45 muO-cm. The films are free of carbon and have low concentrations of oxygen (∼4 at. %). Deposition at 150°C achieves films of formula ZrB1.8O 0.1. In contrast, films grown under purely thermal conditions or by other plasma-assisted methods have boron-to-metal ratios near 3:1 and oxidize readily in air. |
Issue Date: | 2001 |
Type: | Text |
Language: | English |
Description: | 181 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2001. |
URI: | http://hdl.handle.net/2142/84023 |
Other Identifier(s): | (MiAaPQ)AAI3017083 |
Date Available in IDEALS: | 2015-09-25 |
Date Deposited: | 2001 |
This item appears in the following Collection(s)
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Dissertations and Theses - Chemistry
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Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois