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Title:Amplification of Soft Lithographic Patterning of Silicon
Author(s):Harada, Yoshiko
Doctoral Committee Chair(s):Girolami, Gregory S.; Nuzzo, Ralph G.
Department / Program:Chemistry
Discipline:Chemistry
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Materials Science
Abstract:Two examples of Si patterning via microcontact printing (muCP) are given in this thesis. In both cases, Si substrates were patterned with OTS by MCP to protect the underlying substrate. The first example shows the use of an OTS template in orthogonal printing of OCT to activate OTS-free areas, followed by surface-initiated ring-opening metathesis polymerization (ROMP) of strained olefins to amplify the original pattern inscribed by muCP In the second example, an OTS template was used to selectively deposit a Pt(O) complex, which was used in Pt-assisted etching of Si(100) to produce porous silicon structures in the Pt-coated regions.
Issue Date:2002
Type:Text
Language:English
Description:128 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2002.
URI:http://hdl.handle.net/2142/84062
Other Identifier(s):(MiAaPQ)AAI3044104
Date Available in IDEALS:2015-09-25
Date Deposited:2002


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