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Description
Title: | Solution-Based Deposition of Ultrathin Metal Oxide Films on Metal and Superconductor Surfaces |
Author(s): | Westwood, Glenn |
Doctoral Committee Chair(s): | Walter G. Kemperer |
Department / Program: | Chemistry |
Discipline: | Chemistry |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | Ph.D. |
Genre: | Dissertation |
Subject(s): | Physics, Condensed Matter |
Abstract: | Solution deposition from Zr4(OPrn) 16 was also used to deposit ultrathin zirconia films on gold, silver, and aluminum surfaces. X-ray photoelectron spectroscopy and atomic force microscopy were used to compare the physical properties of these films. Electrical measurements showed that zirconia films on Ag and Au are not insulating, but aluminum-zirconia-aluminum capacitors fabricated by this method displayed capacitance densities between 0.09 tauo 0.50 muF/cm2 (tan delta = 0.09 to 1.12) and current densities between 10-2 to 10-4 A/cm2. |
Issue Date: | 2004 |
Type: | Text |
Language: | English |
Description: | 126 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004. |
URI: | http://hdl.handle.net/2142/84164 |
Other Identifier(s): | (MiAaPQ)AAI3153460 |
Date Available in IDEALS: | 2015-09-25 |
Date Deposited: | 2004 |
This item appears in the following Collection(s)
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Dissertations and Theses - Chemistry
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Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois