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Title:Solution-Based Deposition of Ultrathin Metal Oxide Films on Metal and Superconductor Surfaces
Author(s):Westwood, Glenn
Doctoral Committee Chair(s):Walter G. Kemperer
Department / Program:Chemistry
Discipline:Chemistry
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Physics, Condensed Matter
Abstract:Solution deposition from Zr4(OPrn) 16 was also used to deposit ultrathin zirconia films on gold, silver, and aluminum surfaces. X-ray photoelectron spectroscopy and atomic force microscopy were used to compare the physical properties of these films. Electrical measurements showed that zirconia films on Ag and Au are not insulating, but aluminum-zirconia-aluminum capacitors fabricated by this method displayed capacitance densities between 0.09 tauo 0.50 muF/cm2 (tan delta = 0.09 to 1.12) and current densities between 10-2 to 10-4 A/cm2.
Issue Date:2004
Type:Text
Language:English
Description:126 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004.
URI:http://hdl.handle.net/2142/84164
Other Identifier(s):(MiAaPQ)AAI3153460
Date Available in IDEALS:2015-09-25
Date Deposited:2004


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