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Title:Failure and Fracture of Thin Film Materials for MEMS
Author(s):Jonnalagadda, Krishna Nagasai
Doctoral Committee Chair(s):Chasiotis, Ioannis
Department / Program:Aerospace Engineering
Discipline:Aerospace Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Aerospace
Abstract:The results of this research provided fundamental information about thin film failure at the scale of MEMS, which could be directly applied to perform materials selection and design of MEMS components. The experimental methods described in this thesis were shown to be entirely repeatable and directly applicable to any thin film material. Consequently, they represent a protocol with the potential to become a standardized technique for mechanical property studies at the micron and the nanometer scales.
Issue Date:2008
Type:Text
Language:English
Description:127 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2008.
URI:http://hdl.handle.net/2142/85109
Other Identifier(s):(MiAaPQ)AAI3314810
Date Available in IDEALS:2015-09-25
Date Deposited:2008


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