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Title:Failure of Microelectromechanical Systems Under Dynamic Loading: An Experimental and Numerical Investigation
Author(s):Kimberley, Jamie
Doctoral Committee Chair(s):Lambros, John
Department / Program:Aerospace Engineering
Discipline:Aerospace Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Subject(s):Engineering, Mechanical
Abstract:The response of cantilever beams, representing modle test structures, comprised of metal and ceramic layers was also investigated. Experiments were conducted using the modified split hopkinson pressure bar to investigate the effects of loading amplitude, duration, and profile on the failure of the cantilever beams. Finite element simulations of these beams were conducted to provide more detailed information regarding the deformation of the beams under the various loadings applied in the experiments. Results of the simulations were coupled with experimental measurements of failure stress (measured in quasistatic microtensile tests) in an attempt to predict failure. High-speed imaging was also used to capture the first real-time images of MEMS structures responding to dynamic loading.
Issue Date:2008
Description:171 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2008.
Other Identifier(s):(MiAaPQ)AAI3314822
Date Available in IDEALS:2015-09-25
Date Deposited:2008

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