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Title:Modeling of Wave Heated Discharges Used in Plasma Processing Reactors
Author(s):Kinder Oxom, Ronald Leonel
Doctoral Committee Chair(s):Kushner, Mark J.
Department / Program:Nuclear Engineering
Discipline:Nuclear Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:Ph.D.
Genre:Dissertation
Subject(s):Engineering, Nuclear
Abstract:Asymmetric antennas (m = +1,-1) produce 3-D components of the electric field lacking any significant symmetries and so must be fully resolved in 3-D. To investigate these processes, a 3-D plasma equipment model was improved to resolve 3-D components of the electric field produced by m = + 1,-1 antennas in solenoidal magnetic fields. For magnetic fields of 10--600 G, rotation of the electric field was observed downstream of the antenna where significant power deposition also occurs.
Issue Date:2001
Type:Text
Language:English
Description:152 p.
Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2001.
URI:http://hdl.handle.net/2142/85890
Other Identifier(s):(MiAaPQ)AAI3023159
Date Available in IDEALS:2015-09-28
Date Deposited:2001


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