Lithium Debris Removal by Sputtering and Evaporation for EUV Optics and Applications

Neumann, Martin John

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Title:	Lithium Debris Removal by Sputtering and Evaporation for EUV Optics and Applications
Author(s):	Neumann, Martin John
Doctoral Committee Chair(s):	Ruzic, David N.
Department / Program:	Nuclear Engineering
Discipline:	Nuclear Engineering
Degree Granting Institution:	University of Illinois at Urbana-Champaign
Degree:	Ph.D.
Genre:	Dissertation
Subject(s):	Physics, Fluid and Plasma
Abstract:	The simultaneous process of deposition, evaporation, and sputtering of lithium was modeled and corroborated with experimental observations such that no net deposition on the collector optic was measured and showed the model to being a viable option that can be used for predictive scenarios involving deposition, evaporation, and sputtering are undertaken.
Issue Date:	2007
Type:	Text
Language:	English
Description:	238 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2007.
URI:	http://hdl.handle.net/2142/85914
Other Identifier(s):	(MiAaPQ)AAI3290332
Date Available in IDEALS:	2015-09-28
Date Deposited:	2007