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Description
Title: | Lithium Debris Removal by Sputtering and Evaporation for EUV Optics and Applications |
Author(s): | Neumann, Martin John |
Doctoral Committee Chair(s): | Ruzic, David N. |
Department / Program: | Nuclear Engineering |
Discipline: | Nuclear Engineering |
Degree Granting Institution: | University of Illinois at Urbana-Champaign |
Degree: | Ph.D. |
Genre: | Dissertation |
Subject(s): | Physics, Fluid and Plasma |
Abstract: | The simultaneous process of deposition, evaporation, and sputtering of lithium was modeled and corroborated with experimental observations such that no net deposition on the collector optic was measured and showed the model to being a viable option that can be used for predictive scenarios involving deposition, evaporation, and sputtering are undertaken. |
Issue Date: | 2007 |
Type: | Text |
Language: | English |
Description: | 238 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2007. |
URI: | http://hdl.handle.net/2142/85914 |
Other Identifier(s): | (MiAaPQ)AAI3290332 |
Date Available in IDEALS: | 2015-09-28 |
Date Deposited: | 2007 |
This item appears in the following Collection(s)
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Dissertations and Theses - Nuclear, Plasma, and Radiological Engineering
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Graduate Dissertations and Theses at Illinois
Graduate Theses and Dissertations at Illinois