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 Title: Plasma-Material Interactions: A Langmuir Probe Analysis of a Cylindrical SiO(2) Deposition System and a Computational Study Using VFTRIM3D Author(s): Turkot, Robert Bruce, Jr Doctoral Committee Chair(s): Ruzic, David N. Department / Program: Nuclear Engineering Discipline: Nuclear Engineering Degree Granting Institution: University of Illinois at Urbana-Champaign Degree: Ph.D. Genre: Dissertation Subject(s): Engineering, Materials Science Abstract: The $\rm SiO\sb2$ films deposited in this system are analyzed for their gas permeation qualities and are correlated to the plasma properties gathered using Langmuir probes as well as the gas, pressure, and time recipes used to produce them. It is found in this work that the application of $\rm SiO\sb2$ films onto flexible PET bottles using the fashion explained herein results in a decrease in the gas permeation characteristics of the $\rm SiO\sb2$-PET membrane as desired, but is found to be independent of the thickness of the $\rm SiO\sb2$ present. This limit is found to be caused by cracks and pinhole defects across the $\rm SiO\sb2$ film that permit uninhibited gas flow directly to the PET bottle. Issue Date: 1997 Type: Text Language: English Description: 273 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1997. URI: http://hdl.handle.net/2142/85931 Other Identifier(s): (MiAaPQ)AAI9717340 Date Available in IDEALS: 2015-09-28 Date Deposited: 1997
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