Browse Dissertations and Theses - Physics by Subject "aberration reduction"

  • Xiu, Kai (2001)
    This thesis deals with topics of aberration reduction in high voltage ("" 100 k V) electron optical instruments, especially used for lithography (SCALPEL) and high resolution electron microscopy (HREM). Since the invention ...

    application/pdf

    application/pdfPDF (4MB)Restricted to U of Illinois