Files in this item

FilesDescriptionFormat

application/pdf

application/pdfAlexNathanKahn_2015.pdf (38MB)
Thesis PDF

application/pdf

application/pdfAlexNathanKahn_Final_2016.pdf (37MB)
Report on continuation of researchPDF

Description

Title:Microassembly of a Silicon Micro-House
Author(s):Kahn, Alex Nathan
Advisor(s):Keum, Hohyun; Kim, Seok
Contributor(s):Kim, Seok
Department / Program:Mechanical Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Degree:B.S. (bachelor's)
Genre:thesis
Subject(s):Micro-masonry
silicon
transfer printing
micro fabrication
Abstract:This study provides details on the design, fabrication, and documentation of a silicon Micro-House made by micro-masonry. Micro-masonry is a microsystem construction method that incorporates the fabrication and assembly of silicon units, or inks. A model of a house was divided into 24 cross sections, and a corresponding optical mask allowed for the production of inks by conventional lithography processes. The inks were fabricated from two silicon on insulator wafers that had device layer thicknesses of 10 and 20 micron, so that different sections of the house could be made from different thickness inks. The inks were suspended on photoresist anchors, which facilitated pick-and-place assembly by transfer printing with elastomeric stamps. The structure was annealed after each layer was placed, to prevent delamination between subsequent layers. The final structure was documented with a scanning electron microscope, as a demonstrative piece to showcase the structural complexity capable through transfer printing.
Issue Date:2015-12-18
Genre:Dissertation / Thesis
Type:Text
Language:English
URI:http://hdl.handle.net/2142/88862
Sponsor:ISUR
Rights Information:Copyright 2016 Alex Nathan Kahn
Date Available in IDEALS:2016-02-03


This item appears in the following Collection(s)

Item Statistics