Browse Dissertations and Theses - Electrical and Computer Engineering by Author "Wang, Chinlee"

  • Wang, Chinlee (1998)
    The devices are fabricated with lightly doped silicon substrates, 19-A to 34-A gate oxide, $\sim$0.05-$\mu$um gate lithography, 100-A sidewall oxides, self-aligned PtSi, and no intentional doping. The thin gate and sidewall ...

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