Browse Dissertations and Theses - Electrical and Computer Engineering by Contributor "David J. Beebe"

  • Suh, Hyuk-Jeen (2001)
    Various test devices were successfully fabricated using the developed process to demonstrate a dry sacrificial etching technique. An array of cantilever beams 100 mum in width by 1000 mum in length was successfully released ...

    application/pdf

    application/pdfPDF (5MB)Restricted to U of Illinois
  • Wang, Lin (2001)
    This research includes the sensor design, fabrication, modeling, characterization, and application. The sensor design is based on a silicon diaphragm structure instrumented with four piezoresistors. A square mesa on top ...

    application/pdf

    application/pdfPDF (5MB)Restricted to U of Illinois
  • Tang, Hui (2000)
    While tactile displays have been designed for the fingertip and other body locations of relatively larger area, the potential of the oral cavity for housing a tactile interface is largely unexplored. Nevertheless, with ...

    application/pdf

    application/pdfPDF (6MB)Restricted to U of Illinois