Browse Dissertations and Theses - Electrical and Computer Engineering by Contributor "Topaloglu, Rasit O."

  • Zhang, Hongbo (2012-09-18)
    Lithography continues to be the backbone of the integrated circuit (IC) industry. While the critical dimension (CD) keeps shrinking with the pace of Moore’s law, the progress in lithography lags far behind. The gap between ...

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  • Du, Yuelin (2014-09-16)
    Lithography has always been the most critical process in integrated circuit (IC) fabrication. Below the 28 nm technology node, conventional 193 nm immersion lithography (193i) with single exposure has reached its printability ...

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