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Title:Microassembly of a Silicon Micro-House
Author(s):Kahn, Alex Nathan
Contributor(s):Kim, Seok
Transfer Printing
Abstract:This study provides details on the design, fabrication, and documentation of a silicon Micro-House made by micro-masonry. Micro-masonry is a microsystem construction method that incorporates the fabrication and assembly of silicon units, or inks, by transfer printing. A model of a house was divided into 9 cross sections, and a corresponding optical mask allowed for the production of inks by conventional lithography processes. The inks were fabricated from two silicon on insulator wafers that had device layer thicknesses of 10 and 20 micron, so that different sections of the house could be made from different thickness inks. The inks were suspended on photoresist anchors, which facilitated pick-and-place assembly by transfer printing with elastomeric stamps. The structure was annealed after each layer was placed, to prevent delamination between subsequent layers. The final structure was documented with a scanning electron microscope, as a demonstrative piece to showcase the structural complexity capable through transfer printing.
Issue Date:2016
Publisher:Illinois Scholar Undergraduate Research Program
Genre:Conference Poster
Sponsor:Semiconductor Research Corporation
Rights Information:Copyright 2016, Kahn
Date Available in IDEALS:2016-04-18

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