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Title:Characterization of Magnetron-Sputtered Partially Ionized Deposition as a Function of Metal and Gas Species
Author(s):Allain, Monica M. C.
Discipline:Nuclear, Plasma, and Radiological Engineering
Degree:M.S. (master's)
Genre:Thesis
Subject(s):nuclear engineering
gas species
ionized deposition
metal species
magnetron-sputtered
ionized metal fluxes
cathode
gridded energy analyzer
quartz crystal microbalance
Issue Date:2000
Genre:Dissertation/Thesis
Type:Text
Language:English
URI:http://hdl.handle.net/2142/96303
Rights Information:Copyright 2000 Monica Marie Cortez Allain
Date Available in IDEALS:2017-07-06


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