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Title:Determination of Ionization Fraction and Plasma Potential in a DC Magnetron Sputtering System Using a Quartz Crystal Microbalance and a Gridded Energy Analyzer
Author(s):Green, Karyn M.
Discipline:Nuclear, Plasma, and Radiological Engineering
Degree:M.S. (master's)
Genre:Thesis
Subject(s):nuclear engineering
ionization fraction
plasma potntial
DC magnetron
quartz crystal
gridded energy analyzer
diagnostic
ion-to-neutral ratio
linear motion feedtthrough
wafer chuck
Issue Date:1997
Genre:Dissertation/Thesis
Type:Text
Language:English
URI:http://hdl.handle.net/2142/96346
Rights Information:Copyright 1997 Karyn Melissa Green
Date Available in IDEALS:2017-07-06


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