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Residual stress effects on piezoelectric response of sol-gel derived lead zirconate titanate thin films

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Title: Residual stress effects on piezoelectric response of sol-gel derived lead zirconate titanate thin films
Author(s): Berfield, Thomas A.; Ong, Ryan J.; Payne, David A.; Sottos, Nancy R.
Subject(s): Residual stress
Abstract: Piezoelectric properties of three sol-gel derived Pb(Zr0.53Ti0.47)O3 thin film specimens of different thicknesses integrated onto Pt/Ti/SiO2||Si substrates are investigated to delineate the influence of residual stress on the strain-field response characteristics from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for films ranging in thickness from 190 to 500 nm. Field-induced strains are measured interferometrically for each film under either a large ac driving voltage or a small ac ripple applied over a range of dc biases. Higher residual stresses decrease measured piezoelectric response, while thickness variations with no accompanying change in residual stress state produce little change in strain-field behavior. The diminished performance associated with high residual stresses is attributed to reductions in both linear and nonlinear contributions, including decreased polarization switching and domain motion.
Issue Date: 2007
Publisher: American Institute of Physics
Citation Info: The following article appeared in Thomas A. Berfield, Ryan J. Ong, David A. Payne, Nancy R. Sottos. Residual stress effects on piezoelectric response of sol-gel derived lead zirconate titanate thin films. Journal of Applied Physics, Vol. 101, 2007, pp 024102 (7 pages) and may be found at http://link.aip.org/link/?jap/101/024102.
Genre: Article
Type: Text
Language: English
URI: http://hdl.handle.net/2142/964
DOI: 10.1063/1.2422778
Publication Status: published or submitted for publication
Rights Information: Copyright 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
Date Available in IDEALS: 2007-06-18
Has Version(s): Previously released as TAM Report 1062. http://hdl.handle.net/2142/320
 

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