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Title:Consequences of Mode Structure on Plasma Parameters in Electron Cyclotron Resonance Sources used for Materials Processing
Author(s):Kinder, Ronald L.
Discipline:Nuclear, Plasma, and Radiological Engineering
Degree:M.S. (master's)
Genre:Thesis
Subject(s):nuclear engineering
mode structure
plasma parameters
electron cyclotron resonance
materials processing
downstream etching
downstream depositon
radicals
surface treatment
Issue Date:1998
Genre:Dissertation/Thesis
Type:Text
Language:English
URI:http://hdl.handle.net/2142/96412
Rights Information:Copyright 1998 Tod E. Kasper
Date Available in IDEALS:2017-07-06


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