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Title:Ionized Physical Vapor Deposition of Aluminum Oxide
Author(s):Li, Ning
Discipline:Nuclear, Plasma, and Radiological Engineering
Degree:M.S. (master's)
Genre:Thesis
Subject(s):nuclear engineering
ionized physical vapor deposition
aluminum oxide
reactive sputtering
planar magnetron system
aluminum target
Issue Date:2002
Genre:Dissertation/Thesis
Type:Text
Language:English
URI:http://hdl.handle.net/2142/96436
Rights Information:Copyright 2002 Ning Li
Date Available in IDEALS:2017-07-06


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